HORIBA offer a wide variety of products for mass flow control in the form of controllers and meters. All our mass flow control products offer high accuracy and a fast response time. The range of gas flow controllers includes two types of sensors, pressure differential type and thermal type and various communication protocols; analogue, digital, DeviceNet™, PROFIBUS® and EtherCAT®. Choose between the high precision piezo stack valve or the more traditional solenoid valve to control your process gas.
All metal seal or Viton™ seal are available depending on your gas or liquid compatibility requirements.
Ultra wide range devices with a turndown ration of 1000:1 are available.
Multi gas (where the user can program the gas type) and multi range (where the user can configure the flow range) are available for when you need flexibility. These multigas multi range flow controllers also reduce the amount of inventory you need to hold.
View our MFC comparison chart here
High Speed & Precision Pressure Insensitive Mass Flow Module
Wide Range Pressure Insensitive Mass Flow Module
Ultra-thin Mass Flow Module
Micro Flow Pressure Insensitive Mass Flow Module
Best Performance Pressure Insensitive Mass Flow Module
New concept Pressure Insensitive Mass Flow Module
Thermal Flow Splitter
Function Control Unit with Mass Flow Controllers
Automatic Span Gas Unit for Parallel calibration
Automatic Span Gas Unit for Serial calibration
Automatic Span Gas Unit Transferstandard
Automatic Span Gas Generator Unit for Quality control at field test
Digital Mass Flow Controller
High Temperature Digital Mass Flow Controller
Pressure Insensitive Mass Flow Controller
Mass Flow Controller
Multi Range/Multi Gas Digital Mass Flow Controller
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