Specifications of SEC-8000 F/D/E Series
External Dimension
High Temperature Digital Mass Flow Controller
The SEC-8000F/D/E series can operate in high temperature environments, from 15 ℃ to 120 ℃, for a variety of tasks including semiconductor and compound semiconductor processing.
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Control Unit
Conversion Adapters
Dedicated power sources
Display Unit
Mass Flow Checker
Monitor Unit
Setting Units