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        • Readout No. E58 - Analysis and Measurement Technologies that Contribute to the Development of Next Generation Semiconductor Devices
        • Readout No. E57 - HORIBA’s Initiatives in the Next-Generation Energy and Environment Fields
        • Readout No. E56 - Analytical Solutions in Megatrends
        • Readout No. E55 - 2021 Masao Horiba Awards - Spectroscopic analysis and measurement technology in the life science field
        • Readout No. E54 - Microplastics and Nanoplastics: Analysis and Method Development
        • Masao Horiba Awards Research Articles
        • Readout No. E53 - 2019 Masao Horiba Awards - Advanced Analytical and Measurement Technologies for Efficient Control System to Maximize the Performance of Electric Power and Batteries Usage
        • Readout No. E52 - Green Innovation for Marine Shipping Industry
        • Readout No. E51 - 2018 Masao Horiba Awards Advanced analytical and measurement technologies in semiconductor manufacturing processes
        • Readout No. E50 - Low-Carbon Society and Environmental Improvement
        • Readout No. E49 - Photonic Instrumentation in Life Science
        • Readout No. E48 - Water Measurement Experts
        • Readout No. E47 - Application for Semiconductor Manufacturing Process
        • Readout No. E46 - New Development for Automotive Test Systems
        • Readout No. E45 - Application Technology in Analysis
        • Readout No. E44 - Contribution of Diagnostics to Total Medical Care/Healthcare
        • Readout No. E43 - Watching the Environmental and Society with Measurements
        • Readout No. E42 - More Efficient Testing on Automotive Development, Improving the Accuracy of Fuel Consumption Measurement
        • Readout No. E41 - Application
        • Readout No. E40 - Application
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        • Readout No. E17 - AMERICA
        • Readout No. E16 - Chinese (Asia)
        • Readout No. E15 - Technologies for HORIBA STEC
        • Readout No. E14 - Masao HORIBA Awards"Measurement of Bioparticles" and "Measurement of Internal Combustion"
        • Readout No. E13 - Technologies for Automotive Testing
        • Readout No. E12 - Masao Horiba Awards "X-ray Analysis Technology"
        • Readout No. E11 - The Second Masao Horiba Awards
        • Readout No. E10 - Environmental Analysis Technologies for the Management of Global Environment and the Development of Industry
        • Readout No. E09 - The First Dr.Masao Horiba's Award and the 50th Anniversary Products
        • Readout No. E08 - Products and Technologies of HORIBA ABX
        • Readout No. E07 - Products and Technologies of Jobin Yvon HORIBA Group
        • Readout No. E06 - 50th Anniversary of HORIBA, Ltd. Products and Technology of HORIBA Group
        • Readout No. E05 - Semiconductor Instruments
        • Readout No. E04 - Hematology Instruments
        • Readout No. E03 - Paticulate Matter
        • Readout No. E02 - The Technology Alliance for X-ray Analysis
        • Readout No. E01 - the Analysis of the Global Environment
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Technical Journal "Readout" open open
  • Readout No. E58 - Analysis and Measurement Technologies that Contribute to the Development of Next Generation Semiconductor Devices
  • Readout No. E57 - HORIBA’s Initiatives in the Next-Generation Energy and Environment Fields
  • Readout No. E56 - Analytical Solutions in Megatrends
  • Readout No. E55 - 2021 Masao Horiba Awards - Spectroscopic analysis and measurement technology in the life science field
  • Readout No. E54 - Microplastics and Nanoplastics: Analysis and Method Development
  • Masao Horiba Awards Research Articles
  • Readout No. E53 - 2019 Masao Horiba Awards - Advanced Analytical and Measurement Technologies for Efficient Control System to Maximize the Performance of Electric Power and Batteries Usage
  • Readout No. E52 - Green Innovation for Marine Shipping Industry
  • Readout No. E51 - 2018 Masao Horiba Awards Advanced analytical and measurement technologies in semiconductor manufacturing processes
  • Readout No. E50 - Low-Carbon Society and Environmental Improvement
  • Readout No. E49 - Photonic Instrumentation in Life Science
  • Readout No. E48 - Water Measurement Experts
  • Readout No. E47 - Application for Semiconductor Manufacturing Process
  • Readout No. E46 - New Development for Automotive Test Systems
  • Readout No. E45 - Application Technology in Analysis
  • Readout No. E44 - Contribution of Diagnostics to Total Medical Care/Healthcare
  • Readout No. E43 - Watching the Environmental and Society with Measurements
  • Readout No. E42 - More Efficient Testing on Automotive Development, Improving the Accuracy of Fuel Consumption Measurement
  • Readout No. E41 - Application
  • Readout No. E40 - Application
  • Readout No. E18 - EUROPE
  • Readout No. E17 - AMERICA
  • Readout No. E16 - Chinese (Asia)
  • Readout No. E15 - Technologies for HORIBA STEC
  • Readout No. E14 - Masao HORIBA Awards"Measurement of Bioparticles" and "Measurement of Internal Combustion"
  • Readout No. E13 - Technologies for Automotive Testing
  • Readout No. E12 - Masao Horiba Awards "X-ray Analysis Technology"
  • Readout No. E11 - The Second Masao Horiba Awards
  • Readout No. E10 - Environmental Analysis Technologies for the Management of Global Environment and the Development of Industry
  • Readout No. E09 - The First Dr.Masao Horiba's Award and the 50th Anniversary Products
  • Readout No. E08 - Products and Technologies of HORIBA ABX
  • Readout No. E07 - Products and Technologies of Jobin Yvon HORIBA Group
  • Readout No. E06 - 50th Anniversary of HORIBA, Ltd. Products and Technology of HORIBA Group
  • Readout No. E05 - Semiconductor Instruments
  • Readout No. E04 - Hematology Instruments
  • Readout No. E03 - Paticulate Matter
  • Readout No. E02 - The Technology Alliance for X-ray Analysis
  • Readout No. E01 - the Analysis of the Global Environment
    Company » About HORIBA » Technical Journal "Readout" » Readout No. E51 - 2018 Masao Horiba Awards Advanced analytical and measurement technologies in semiconductor manufacturing processes

2018 Masao Horiba Awards Advanced analytical and measurement technologies in semiconductor manufacturing processes

Technical Journal "Readout"

Readout

READOUT is a technical journal issued by HORIBA. The name "READOUT" represents our sincere desire - helping readers understand the company's proprietary products and technologies by offering information about them. Since its first issue in July 1990, the journal has been published biannually.

Readout No. E51

2018 Masao Horiba Awards – Advanced analytical and measurement technologies in semiconductor manufacturing processes

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2.25 MB
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The 15th Anniversary of Masao Horiba Awards
Author: Atsushi HORIBA
open
PDF
2.3 MB
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High-speed and precise laser interferometry developed for plasma electron-density diagnostics
Author:Keiichiro URABE
open
PDF
1.79 MB
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Development of substrate temperature monitoring system for high-accuracy plasma process
Author:Takayoshi TSUTSUMI
open
PDF
2.16 MB
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Detection of electronic defects in semiconductor thin-films during plasma processing
Author:Shota NUNOMURA
open
PDF
2.69 MB
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Non-invasive plasma characterization through the ion velocity distribution function
Author:Tsanko Vaskov TSANKOV
open
PDF
1.74 MB
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Hybrid metrology to measure unseeable quantities: stress distribution in miniaturized transistors by Raman scattering spectroscopy
Author:Toshihiko KANAYAMA
open
PDF
1.88 MB
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Simulation of Dilute Hydrofluoric Acid Etching of Silicon Dioxide Films in Constrained Spaces
Author:Ryan O’CONNELL, Srini RAGHAVAN
open
PDF
2.66 MB
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Measurement and monitoring of processing plasmas
Author:Masaharu SHIRATANI
open
PDF
2.93 MB
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Fabrication technology and characteristics of MOS device on atomically flat silicon surface
Author:Akinobu TERAMOTO
open
PDF
3.8 MB
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The Current Status and Technical Issues, and Future Prospect for Extreme Ultraviolet Lithography
Author:Takeo WATANABE
open
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