Carbon Sensor Conductivity Meter (Low concentration type)
Ideal for chemical measurements in semiconductor wet processes. This unit measures conductivity and is perfect for management of concentration during processes, management of chemical dilution, and monitoring the recycling of ultra-pure water.
Sensor with excellent chemical resistance and pressure resistance
By employing a special electrode, it is ideal for measuring the conductivity of DIW (de-ionized water) rinse after chemical processing and for measurements in the circulation line.
Metal contamination-free
With the use of a special carbon material as the electrode, there is no concern of metal contamination.
Abundant temperature compensation features
Choices can be made concerning temperature characteristics for ultra-pure water (reference temperature 25°C), NaCl temperature characteristics, and temperature compensation coefficients at the reference temperature. This allows for temperature compensation tailored to the liquid to be measured.
| Sensor | ESH-01-L-GC5 (Cell constant : 0.1/cm) | ESH-1-L-GC9 (Cell constant : 1/cm) | |||
|---|---|---|---|---|---|
| Conductivity | 0.00 to 20.00 µS/cm | 0.0 to 200.0 µS/cm | 0.0 to 200.0 µS/cm | 0 to 2000 µS/cm | *1 |
| 20.00 to 70.00 µS/cm | 200.0 to 999.9 µS/cm | 200.0 to 700.0µS/cm | 2000 to 9999 µS/cm | *2 | |
| Repeatability | *1 Within +/- 0.5% of the full scale *2 Within +/- 1.0% of the full scale | ||||
Schematics
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