Pressure-based Mass Flowmetry

Structure

Starting from the gas inlet, the device consists of an external particle protection filter, an inlet line pressure sensor, a control valve, a pair of pressure sensors, a flow resistor (flow restrictor), and a digital electric circuit. Not only does the gas channel contain no heat source, it is made entirely from metallic materials and has a polished interior surface as standard, making this an ultra-clean model.

Browse Products

D700uF
D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700T
D700T

Best Performance Pressure Insensitive Mass Flow Module

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

DZ-100
DZ-100

Ultra-thin Mass Flow Module

VG-200S
VG-200S

Capacitance Manometer

CRITERION D500
CRITERION D500

Pressure Insensitive Mass Flow Module